Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11276547 | Charged particle optical apparatus for through-the-lens detection of particles | Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean | 2022-03-15 |
| 11239054 | Multi-beam particle beam system | Yanko Sarov, Jan Horn, Ulrich Bihr, Christof Riedesel | 2022-02-01 |