Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11378887 | Pupil facet mirror, illumination optics and optical system for a projection lithography system | — | 2022-07-05 |
| 11262660 | Image sensor, position sensor device, lithography system, and method for operating an image sensor | Jan Horn, Ulrich Bihr, Andy Zott | 2022-03-01 |