Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415895 | Compensation of creep effects in an imaging device | Marwene Nefzi, Ralf Zweering | 2022-08-16 |
| 11366395 | Mirror, in particular for a microlithographic projection exposure system | Kerstin Hild, Vitaliy Shklover | 2022-06-21 |
| 11360393 | Mirror, in particular for a microlithographic projection exposure system | Ben Wylie-Van Eerd, Frederik Bijkerk, Kerstin Hild, Stefan Schulte, Simone Weyler | 2022-06-14 |
| 11320314 | Method and device for determining the heating state of an optical element in an optical system for microlithography | Joachim Hartjes, Markus Hauf, Gerhard Beurer | 2022-05-03 |