Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11320314 | Method and device for determining the heating state of an optical element in an optical system for microlithography | Toralf Gruner, Joachim Hartjes, Markus Hauf | 2022-05-03 |