Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467500 | Optical arrangement and method for repairing the optical arrangement after a shock load | — | 2022-10-11 |
| 11320314 | Method and device for determining the heating state of an optical element in an optical system for microlithography | Toralf Gruner, Markus Hauf, Gerhard Beurer | 2022-05-03 |
| 11307503 | Support of an optical unit | Martin Vogt | 2022-04-19 |