Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525946 | Method for in situ protection of an aluminum layer and optical arrangement for the VUV wavelength range | — | 2022-12-13 |
| 11366395 | Mirror, in particular for a microlithographic projection exposure system | Kerstin Hild, Toralf Gruner | 2022-06-21 |
| 11328831 | Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus | Christian Grasse, Martin Hermann, Stephan Six, Joern WEBER, Ralf Winter +3 more | 2022-05-10 |