Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11366395 | Mirror, in particular for a microlithographic projection exposure system | Toralf Gruner, Vitaliy Shklover | 2022-06-21 |
| 11360393 | Mirror, in particular for a microlithographic projection exposure system | Ben Wylie-Van Eerd, Frederik Bijkerk, Toralf Gruner, Stefan Schulte, Simone Weyler | 2022-06-14 |
| 11328831 | Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus | Christian Grasse, Martin Hermann, Stephan Six, Joern WEBER, Ralf Winter +3 more | 2022-05-10 |