Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11328831 | Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus | Martin Hermann, Stephan Six, Joern WEBER, Ralf Winter, Oliver Dier +3 more | 2022-05-10 |