Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500294 | Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the method | Daniel Runde, Florian Baumer, Ulrich Mueller | 2022-11-15 |
| 11415892 | Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus | Matthias KAES, Steffen Bezold, Matthias Manger, Pavel Alexeev, Walter Pauls | 2022-08-16 |