Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415892 | Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus | Matthias KAES, Steffen Bezold, Matthias Manger, Christoph Petri, Pavel Alexeev | 2022-08-16 |