Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415892 | Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus | Matthias KAES, Steffen Bezold, Christoph Petri, Pavel Alexeev, Walter Pauls | 2022-08-16 |
| 11274914 | Measuring assembly for the frequency-based determination of the position of a component | Andreas Koeniger, Alexander Vogler | 2022-03-15 |