Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11498380 | Arrangement of an angle measurement device | Julian Stratmann, Josef Holtheide, Felix Kallaß, Thorsten Sander | 2022-11-15 |
| 11500294 | Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the method | Christoph Petri, Daniel Runde, Ulrich Mueller | 2022-11-15 |
| 11279191 | Ball joint | Josef Holtheide, Felix Kallass | 2022-03-22 |