Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500294 | Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the method | Christoph Petri, Florian Baumer, Ulrich Mueller | 2022-11-15 |