Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11421322 | Blocker plate for use in a substrate process chamber | Xiaoxiong Yuan, Yu Lei, Yi Xu, Kazuya Daito, Pingyan Lei +2 more | 2022-08-23 |
| 11239058 | Protective layers for processing chamber components | Karthikeyan Balaraman, Balamurugan Ramasamy, Kartik Shah, Mats Larsson, Kevin A. PAPKE +2 more | 2022-02-01 |