Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11498100 | Apparatus for cleaning semiconductor substrates | Xiaofeng Tao, Fuping Chen, Shena Jia, Xi Wang, Xiaoyan Zhang +1 more | 2022-11-15 |
| 11469134 | Plating chuck | Jian Wang, Zhaowei Jia, Hongchao Yang | 2022-10-11 |
| 11462423 | Method and apparatus for cleaning semiconductor wafer | Fuping Chen, Liangzhi Xie, Shena Jia, Xi Wang, Xiaoyan Zhang | 2022-10-04 |
| 11367649 | Semiconductor substrate polishing methods | Vandan Tanna, Tracy Michelle Ragan, James Raymond Capstick | 2022-06-21 |
| 11335550 | Method and apparatus for cleaning semiconductor wafer | Xi Wang, Fuping Chen | 2022-05-17 |
| 11298727 | Substrate cleaning apparatus | Jun Wu, Cheng-Liang Cheng, Xi Wang, Zhenming Chu | 2022-04-12 |
| 11257667 | Methods and apparatus for cleaning semiconductor wafers | Jun Wang, Fufa Chen, Fuping Chen, Jian Wang, Xi Wang +5 more | 2022-02-22 |