Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11498100 | Apparatus for cleaning semiconductor substrates | Hui Wang, Xiaofeng Tao, Shena Jia, Xi Wang, Xiaoyan Zhang +1 more | 2022-11-15 |
| 11462423 | Method and apparatus for cleaning semiconductor wafer | Hui Wang, Liangzhi Xie, Shena Jia, Xi Wang, Xiaoyan Zhang | 2022-10-04 |
| 11335550 | Method and apparatus for cleaning semiconductor wafer | Hui Wang, Xi Wang | 2022-05-17 |
| 11257667 | Methods and apparatus for cleaning semiconductor wafers | Jun Wang, Hui Wang, Fufa Chen, Jian Wang, Xi Wang +5 more | 2022-02-22 |