Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462423 | Method and apparatus for cleaning semiconductor wafer | Hui Wang, Fuping Chen, Shena Jia, Xi Wang, Xiaoyan Zhang | 2022-10-04 |
| 11257667 | Methods and apparatus for cleaning semiconductor wafers | Jun Wang, Hui Wang, Fufa Chen, Fuping Chen, Jian Wang +5 more | 2022-02-22 |