Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11498100 | Apparatus for cleaning semiconductor substrates | Hui Wang, Xiaofeng Tao, Fuping Chen, Xi Wang, Xiaoyan Zhang +1 more | 2022-11-15 |
| 11462423 | Method and apparatus for cleaning semiconductor wafer | Hui Wang, Fuping Chen, Liangzhi Xie, Xi Wang, Xiaoyan Zhang | 2022-10-04 |