Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10975468 | Method of cleaning plasma processing apparatus | Hiroki Kishi, Mitsuru Hashimoto, Eiichi Nishimura, Akitaka Shimizu | 2021-04-13 |
| 10944051 | Method of cleaning a substrate processing apparatus and the substrate processing apparatus performing the method | Takuya Kubo, Song yun Kang, Tetsuya Ohishi | 2021-03-09 |