Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171286 | Method of processing workpiece | Takuya Kubo | 2021-11-09 |
| 11152564 | Substrate manufacturing method and processing system | Takuya Kubo | 2021-10-19 |
| 10944051 | Method of cleaning a substrate processing apparatus and the substrate processing apparatus performing the method | Takuya Kubo, Keiichi Shimoda, Tetsuya Ohishi | 2021-03-09 |