Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10975468 | Method of cleaning plasma processing apparatus | Hiroki Kishi, Mitsuru Hashimoto, Keiichi Shimoda, Akitaka Shimizu | 2021-04-13 |
| 10923329 | Substrate processing apparatus and substrate processing method | Akitaka Shimizu, Fumiko Yamashita, Daisuke Urayama | 2021-02-16 |