Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10975468 | Method of cleaning plasma processing apparatus | Mitsuru Hashimoto, Keiichi Shimoda, Eiichi Nishimura, Akitaka Shimizu | 2021-04-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10975468 | Method of cleaning plasma processing apparatus | Mitsuru Hashimoto, Keiichi Shimoda, Eiichi Nishimura, Akitaka Shimizu | 2021-04-13 |