Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11024514 | Etching method and etching apparatus | Takuya Abe, Hidenori Miyoshi, Koichi Nagakura | 2021-06-01 |
| 10985029 | Substrate processing apparatus and substrate processing method | Hiroyuki Ogawa, Tomoya Okubo | 2021-04-20 |
| 10975468 | Method of cleaning plasma processing apparatus | Hiroki Kishi, Mitsuru Hashimoto, Keiichi Shimoda, Eiichi Nishimura | 2021-04-13 |
| 10923329 | Substrate processing apparatus and substrate processing method | Eiichi Nishimura, Fumiko Yamashita, Daisuke Urayama | 2021-02-16 |
| 10923358 | Substrate processing method | Muneyuki Imai | 2021-02-16 |
| 10903083 | Substrate processing method, substrate processing apparatus and substrate processing system | Keiko Hada, Koichi Nagakura, Mitsuhiro Tachibana | 2021-01-26 |