Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11024514 | Etching method and etching apparatus | Takuya Abe, Hidenori Miyoshi, Akitaka Shimizu | 2021-06-01 |
| 10910229 | Substrate treatment method | Tamotsu Morimoto, Shuichiro Uda, Takeshi Saito | 2021-02-02 |
| 10903083 | Substrate processing method, substrate processing apparatus and substrate processing system | Keiko Hada, Akitaka Shimizu, Mitsuhiro Tachibana | 2021-01-26 |