Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171004 | Film forming method and substrate processing system | Takashi Sameshima, Koji Maekawa | 2021-11-09 |
| 11155923 | Gas supply device, gas supply method and film forming method | Kensaku Narushima, Hironori Yagi | 2021-10-26 |
| 11028479 | Method of forming film | Takashi Sameshima | 2021-06-08 |
| 10954593 | Tungsten film-forming method, film-forming system and storage medium | Takashi Sameshima, Koji Maekawa | 2021-03-23 |