Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171004 | Film forming method and substrate processing system | Takashi Sameshima, Katsumasa Yamaguchi | 2021-11-09 |
| 10954593 | Tungsten film-forming method, film-forming system and storage medium | Takashi Sameshima, Katsumasa Yamaguchi | 2021-03-23 |
| 10886170 | Method of forming tungsten film | Takashi Sameshima, Shintaro Aoyama, Mikio Suzuki, Susumu Arima, Atsushi Matsumoto +1 more | 2021-01-05 |