Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171004 | Film forming method and substrate processing system | Koji Maekawa, Katsumasa Yamaguchi | 2021-11-09 |
| 11028479 | Method of forming film | Katsumasa Yamaguchi | 2021-06-08 |
| 10954593 | Tungsten film-forming method, film-forming system and storage medium | Koji Maekawa, Katsumasa Yamaguchi | 2021-03-23 |
| 10886170 | Method of forming tungsten film | Koji Maekawa, Shintaro Aoyama, Mikio Suzuki, Susumu Arima, Atsushi Matsumoto +1 more | 2021-01-05 |