Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11155923 | Gas supply device, gas supply method and film forming method | Katsumasa Yamaguchi, Hironori Yagi | 2021-10-26 |
| 10910225 | Film forming method | Atsushi Matsumoto, Nagayasu Hiramatsu, Takanobu HOTTA | 2021-02-02 |