Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069512 | Film forming apparatus and gas injection member used therefor | Shinya Okabe, Takashi Mochizuki, Hideaki Yamasaki, Kazuki DEMPOH | 2021-07-20 |
| 10910225 | Film forming method | Kensaku Narushima, Atsushi Matsumoto, Takanobu HOTTA | 2021-02-02 |