Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150142 | Thermocouple-fixing jig | Hideaki Yamasaki, Takeshi ITATANI | 2021-10-19 |
| 11069512 | Film forming apparatus and gas injection member used therefor | Shinya Okabe, Hideaki Yamasaki, Nagayasu Hiramatsu, Kazuki DEMPOH | 2021-07-20 |
| 10998204 | Method of processing substrate and substrate processing apparatus | Toshiaki Fujisato | 2021-05-04 |