Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150142 | Thermocouple-fixing jig | Takashi Mochizuki, Takeshi ITATANI | 2021-10-19 |
| 11069512 | Film forming apparatus and gas injection member used therefor | Shinya Okabe, Takashi Mochizuki, Nagayasu Hiramatsu, Kazuki DEMPOH | 2021-07-20 |
| 10968514 | Substrate mounting table | Kohichi Satoh, Motoko NAKAGOMI, Junya Oka | 2021-04-06 |
| 10903086 | Titanium silicide region forming method | Kensaku Tanaka, Yuji Kobayashi | 2021-01-26 |