Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11155923 | Gas supply device, gas supply method and film forming method | Katsumasa Yamaguchi, Kensaku Narushima | 2021-10-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11155923 | Gas supply device, gas supply method and film forming method | Katsumasa Yamaguchi, Kensaku Narushima | 2021-10-26 |