Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107706 | Gas phase etching device and gas phase etching apparatus | Jun Zhang, Zhenguo Ma, Xin Wu, Lihui Wen, Yunlong Hu +1 more | 2021-08-31 |
| 10984994 | Deposition apparatus and physical vapor deposition chamber | Jun Zhang, Boyu DONG, Jinrong Zhao, Xuewei Wu, Bingliang GUO +4 more | 2021-04-20 |
| 10937672 | Heating device and heating chamber | Jun Zhang, Xuewei Wu, Boyu DONG, Baogang Xu, Bingliang GUO +2 more | 2021-03-02 |