Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107706 | Gas phase etching device and gas phase etching apparatus | Zhenguo Ma, Xin Wu, Lihui Wen, Yunlong Hu, Henan Zhang +1 more | 2021-08-31 |
| 10984994 | Deposition apparatus and physical vapor deposition chamber | Boyu DONG, Jinrong Zhao, Xuewei Wu, Bingliang GUO, Baogang Xu +4 more | 2021-04-20 |
| 10937672 | Heating device and heating chamber | Xuewei Wu, Boyu DONG, Baogang Xu, Henan Zhang, Bingliang GUO +2 more | 2021-03-02 |
| 10930815 | Light emitting device | Chao Liu, Zhendong NING, Ling Wang, Weihuan LI, Wen Gao +2 more | 2021-02-23 |