ZM

Zhenguo Ma

BC Beijing Naura Microelectronics Equipment Co.: 3 patents #2 of 46Top 5%
Overall (2021): #55,151 of 548,734Top 15%
3
Patents 2021

Issued Patents 2021

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
11107699 Semiconductor manufacturing process Peijun Ding, Bo Zheng, Chun Wang, Jing Shi, Xin Wu +1 more 2021-08-31
11107706 Gas phase etching device and gas phase etching apparatus Jun Zhang, Xin Wu, Lihui Wen, Yunlong Hu, Henan Zhang +1 more 2021-08-31
10937661 Method for removing silicon oxide and integrated circuit manufacturing process 2021-03-02