Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107699 | Semiconductor manufacturing process | Peijun Ding, Bo Zheng, Chun Wang, Jing Shi, Xin Wu +1 more | 2021-08-31 |
| 11107706 | Gas phase etching device and gas phase etching apparatus | Jun Zhang, Xin Wu, Lihui Wen, Yunlong Hu, Henan Zhang +1 more | 2021-08-31 |
| 10937661 | Method for removing silicon oxide and integrated circuit manufacturing process | — | 2021-03-02 |