Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107699 | Semiconductor manufacturing process | Bo Zheng, Zhenguo Ma, Chun Wang, Jing Shi, Xin Wu +1 more | 2021-08-31 |
| 10984993 | Plasma processing apparatus | Peng-Yang Chen, Mengxin Zhao, Gang Wei, Liang Zhang, Bai Yang +1 more | 2021-04-20 |
| 10886142 | Annealing method, process chamber and annealing apparatus | Zhimin BAI, Qiang Li, Bin Deng, Yuchun Deng, Hougong Wang | 2021-01-05 |