Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107665 | Feeding structure, upper electrode assembly, and physical vapor deposition chamber and device | Yuchun Deng, Chao Zhang, Guoqing Qiu, Mengxin Zhao | 2021-08-31 |
| 10984993 | Plasma processing apparatus | Mengxin Zhao, Gang Wei, Liang Zhang, Bai Yang, Guilong Wu +1 more | 2021-04-20 |