Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107665 | Feeding structure, upper electrode assembly, and physical vapor deposition chamber and device | Yuchun Deng, Chao Zhang, Peng-Yang Chen, Mengxin Zhao | 2021-08-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107665 | Feeding structure, upper electrode assembly, and physical vapor deposition chamber and device | Yuchun Deng, Chao Zhang, Peng-Yang Chen, Mengxin Zhao | 2021-08-31 |