Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10886142 | Annealing method, process chamber and annealing apparatus | Zhimin BAI, Qiang Li, Bin Deng, Yuchun Deng, Peijun Ding | 2021-01-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10886142 | Annealing method, process chamber and annealing apparatus | Zhimin BAI, Qiang Li, Bin Deng, Yuchun Deng, Peijun Ding | 2021-01-05 |