Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107706 | Gas phase etching device and gas phase etching apparatus | Jun Zhang, Zhenguo Ma, Xin Wu, Yunlong Hu, Henan Zhang +1 more | 2021-08-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107706 | Gas phase etching device and gas phase etching apparatus | Jun Zhang, Zhenguo Ma, Xin Wu, Yunlong Hu, Henan Zhang +1 more | 2021-08-31 |