Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10984994 | Deposition apparatus and physical vapor deposition chamber | Jun Zhang, Jinrong Zhao, Xuewei Wu, Bingliang GUO, Baogang Xu +4 more | 2021-04-20 |
| 10937672 | Heating device and heating chamber | Jun Zhang, Xuewei Wu, Baogang Xu, Henan Zhang, Bingliang GUO +2 more | 2021-03-02 |