Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189499 | Atomic layer etch (ALE) of tungsten or other metal layers | Yu-Hao Tsai, Du Zhang, Mingmei Wang, Matthew Flaugh | 2021-11-30 |
| 10971372 | Gas phase etch with controllable etch selectivity of Si-containing arc or silicon oxynitride to different films or masks | Subhadeep Kal, Nihar Mohanty, Angelique Raley, Scott Lefevre | 2021-04-06 |
| 10923356 | Gas phase etch with controllable etch selectivity of silicon-germanium alloys | Subhadeep Kal, Masashi Matsumoto, Daisuke Ito, Yusuke Muraki | 2021-02-16 |