MF

Matthew Flaugh

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #352,063 of 548,734Top 65%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11189499 Atomic layer etch (ALE) of tungsten or other metal layers Yu-Hao Tsai, Du Zhang, Mingmei Wang, Aelan Mosden 2021-11-30