Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189499 | Atomic layer etch (ALE) of tungsten or other metal layers | Du Zhang, Mingmei Wang, Aelan Mosden, Matthew Flaugh | 2021-11-30 |
| 11158517 | Selective plasma etching of silicon oxide relative to silicon nitride by gas pulsing | Du Zhang, Mingmei Wang | 2021-10-26 |
| 11152217 | Highly selective silicon oxide/silicon nitride etching by selective boron nitride or aluminum nitride deposition | Du Zhang, Mingmei Wang | 2021-10-19 |
| 11024508 | Independent control of etching and passivation gas components for highly selective silicon oxide/silicon nitride etching | Du Zhang, Mingmei Wang | 2021-06-01 |