Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923356 | Gas phase etch with controllable etch selectivity of silicon-germanium alloys | Subhadeep Kal, Masashi Matsumoto, Daisuke Ito, Aelan Mosden | 2021-02-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923356 | Gas phase etch with controllable etch selectivity of silicon-germanium alloys | Subhadeep Kal, Masashi Matsumoto, Daisuke Ito, Aelan Mosden | 2021-02-16 |