Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D931241 | Lower shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh +1 more | 2021-09-21 |
| D913979 | Inner shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh +1 more | 2021-03-23 |
| 10936386 | Method, device and computer program product for monitoring access request | Wayne Gao, Gary Jialei Wu | 2021-03-02 |