Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181824 | Semiconductor apparatus and method for baking coating layer | Chen Yi Hsu | 2021-11-23 |
| 11163235 | Apparatus for forming a photoresist layer, method for forming a masking layer, and method for forming a photoresist layer | Chen Yi Hsu | 2021-11-02 |
| 11048170 | Apparatus for dispensing liquid material and method for fabricating semiconductor device | Chen Yi Hsu | 2021-06-29 |
| 11035619 | Drainage for temperature and humidity controlling system | Wei Chang Cheng, Chi-Hung Liao, Chien-Hung Wang, Guan-Yu Lin | 2021-06-15 |
| 11022018 | Exhaust system and method of using | Wei Chang Cheng, Ping-Hsu Chen, Chi-Hung Liao, T. S. Lo | 2021-06-01 |
| 11014103 | Substrate processing apparatus and substrate processing method | Wei-Hsiang Tseng | 2021-05-25 |
| 10942329 | Optical module structure | Ho-Ping Chen | 2021-03-09 |