Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181824 | Semiconductor apparatus and method for baking coating layer | Yung-Yao Lee | 2021-11-23 |
| 11163235 | Apparatus for forming a photoresist layer, method for forming a masking layer, and method for forming a photoresist layer | Yung-Yao Lee | 2021-11-02 |
| 11048170 | Apparatus for dispensing liquid material and method for fabricating semiconductor device | Yung-Yao Lee | 2021-06-29 |