Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11130107 | Method for providing deionized water with dynamic electrical resistivity | Chi-Hung Liao, Chien-Hung Wang | 2021-09-28 |
| 11099139 | Photolithography method and photolithography system | Chi-Hung Liao | 2021-08-24 |
| 11067891 | Temperature controlling apparatus | Chi-Hung Liao | 2021-07-20 |
| 11035619 | Drainage for temperature and humidity controlling system | Chi-Hung Liao, Chien-Hung Wang, Guan-Yu Lin, Yung-Yao Lee | 2021-06-15 |
| 11022018 | Exhaust system and method of using | Ping-Hsu Chen, Chi-Hung Liao, T. S. Lo, Yung-Yao Lee | 2021-06-01 |
| 10987706 | Apparatus and methods for exhaust cleaning | Cheng-Kuang Chen, Chi-Hung Liao | 2021-04-27 |
| 10955741 | Reticle cleaning system and method for using the same | Chi-Hung Liao | 2021-03-23 |
| 10948824 | Dispensing nozzle design and dispensing method thereof | Chi-Hung Liao | 2021-03-16 |