Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10964549 | Wafer polishing with separated chemical reaction and mechanical polishing | Shen-Nan Lee, Teng-Chun Tsai, Chu-An Lee, Chen-Hao Wu, Huang-Lin Chao | 2021-03-30 |
| 10920105 | Materials and methods for chemical mechanical polishing of ruthenium-containing materials | An-Hsuan Lee, Shen-Nan Lee, Chen-Hao Wu, Teng-Chun Tsai, Huang-Lin Chao | 2021-02-16 |